发明名称 VACUUM HEATING FURNACE
摘要 PROBLEM TO BE SOLVED: To provide a compact vacuum heating furnace capable of performing processing of vacuum drying of moisture content, a solvent and the like included in various samples (materials) by heating the various samples (materials) with low power consumption while a pressure in a chamber is reduced by pressure reducing means such as a vacuum pump.SOLUTION: The vacuum heating furnace is provided which is connected with pressure reducing means, includes a heater inside thereof and heats a sample 1 in a pressure-reduced vacuum. The vacuum heating furnace includes: a chamber CH which is composed of a substantially-cylindrical container-shaped chamber body 11 closed at one end and opened at the other end, and a bottom plate 12 closing an opening portion of the chamber body 11 and houses a sample; a sample support which is disposed inside the chamber body 11 and holds the sample 1; and the heater 14 disposed in the chamber CH and heating the sample 1.
申请公布号 JP2014081096(A) 申请公布日期 2014.05.08
申请号 JP20120227646 申请日期 2012.10.15
申请人 EBARA CORP;JSR CORP;TOKYO ELECTRON LTD 发明人 KAWASAKI HIROYUKI ; SOFUGAWA TAKUJI ; OKUMURA KATSUYA ; YAMADA KINJI ; NAOI MASAYA ; KIMURA YOSHIO
分类号 F27B5/05;F27B5/14;F27D7/06;F27D11/02;H05B3/00 主分类号 F27B5/05
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