| 摘要 |
The present invention relates to an input sensing device of a contact type cleaning module and comprises: a contact type cleaning unit for being contacted with a transferred substrate and cleaning the substrate; multiple transfer shafts for transferring the substrate toward the contact type cleaning unit; a rotation support block for supporting both ends of the transfer shaft positioned in the adjacent front end of the contact type cleaning unit among the multiple transfer shafts to be able to rotate; a driving support block for supporting the lower part of the rotation support block and having an accepting space part in the lower part of the rotation support block; and a load cell for being positioned in the accepting space part and detecting pressure of the substrate cleaned by the contact type cleaning unit in real time. The present invention adds a load cell capable of detecting weight in a support unit of a transfer shaft positioned in the front end of a contact type cleaning module and directly detects pressure applied to a substrate, thereby preventing generation of a detection error caused by being intervened by different variables. |
