High power ultraviolet light sources and method of fabricating the same

摘要

A vertically conducting LED comprising, in a layered arrangement: a highly thermally conductive submount wherein the highly conductive submount has a thermal conductivity of at least 100 W/m0K; a p-type layer comprising Al1-x-yInyGax N wherein 0≰x≰1 and 0≰y≰1; a quantum well layer comprising Al1-x-yInyGaxN wherein 0≰x≰1 and 0≰y≰1; an n-type layer comprising Al1-x-yInyGaxN wherein 0≰x≰1 and 0≰y≰1; and an n-type contact layer wherein the LED has a peak emission at 200-365 nm.