APPARATUS FOR INSPECTION OF DIELECTRIC SUBSTANCE AND METHOD FOR INSPECTION OF DIELECTRIC SUBSTANCE

摘要

An apparatus for inspecting a dielectric substance comprises: a light emitting unit which radiates light to a dielectric substance; a light amount measuring unit which measures the amount of light passing the dielectric substance; and a determining unit which determines the existence of a defect in the dielectric substance by comparing the measurement value of the light amount measuring unit with a previously set reference value.