| 摘要 |
According to an embodiment, a nonvolatile memory device includes a memory cell string, a control gate, first and second insulating films. The memory cell string includes a semiconductor layer and a plurality of memory cells disposed on the semiconductor layer. The control gate is provided on each of the memory cells. The first insulating film covers each side surface of the memory cells, and a side surface of the control gate. The second insulating film covering an upper portion of the control gate is provided on each of two adjacent memory cells. A first air gap is disposed between the two adjacent memory cells and surround by the first insulating film and the second insulating film, and the semiconductor layer is exposed by the first gap, or thickness of an insulating film between the first gap and the semiconductor layer is thinner than the first insulating film. |
