发明名称 Semiconductor device and method for manufacturing semiconductor device
摘要 A semiconductor device includes an insulation film formed above a semiconductor substrate, a conductor containing Cu formed in the insulation film, and a layer film formed between the insulation film and the conductor and formed of a first metal film containing Ti and a second metal film different from the first metal film, a layer containing Ti and Si is formed on the surface of the conductor.
申请公布号 US8669177(B2) 申请公布日期 2014.03.11
申请号 US20090366020 申请日期 2009.02.05
申请人 KOUNO TAKAHIRO;AKIYAMA SHINICHI;WATATANI HIROFUMI;OWADA TAMOTSU;FUJITSU SEMICONDUCTOR LIMITED 发明人 KOUNO TAKAHIRO;AKIYAMA SHINICHI;WATATANI HIROFUMI;OWADA TAMOTSU
分类号 H01L21/4763 主分类号 H01L21/4763
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