发明名称 Silicon photomultiplier with trench isolation
摘要 A silicon photomultiplier maintains the photon detection efficiency high while increasing a dynamic range, by reducing the degradation of an effective fill factor that follows the increase of cell number density intended for a dynamic range enhancement.
申请公布号 US8664691(B2) 申请公布日期 2014.03.04
申请号 US201113330501 申请日期 2011.12.19
申请人 LEE JOON SUNG;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LEE JOON SUNG
分类号 H01L29/74;H01L31/111 主分类号 H01L29/74
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