发明名称 |
Inspecting method and inspecting apparatus for substrate surface |
摘要 |
An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison. |
申请公布号 |
US8654350(B2) |
申请公布日期 |
2014.02.18 |
申请号 |
US201213672742 |
申请日期 |
2012.11.09 |
申请人 |
HAMAMATSU AKIRA;OSHIMA YOSHIMASA;MAEDA SHUNJI;SHIBUYA HISAE;URANO YUTA;NAKAO TOSHIYUKI;MARUYAMA SHIGENOBU;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
HAMAMATSU AKIRA;OSHIMA YOSHIMASA;MAEDA SHUNJI;SHIBUYA HISAE;URANO YUTA;NAKAO TOSHIYUKI;MARUYAMA SHIGENOBU |
分类号 |
G01B11/30 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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