| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder capable of making thickness of an article-to-be-ground uniform by almost perpendicularly directing a force applied to the article-to-be-ground by a holding pad and making the force uniform.SOLUTION: A holder 13 includes a holding pad 15 which is formed of foamable polyurethane, and a ring-shaped frame material 17 which is attached along a peripheral edge of a bottom surface, pressed against an article-to-be-ground, of the holding pad 15 and which is thinner than a wafer W. A cut 21 is formed along an inner periphery of the frame material 17 on the bottom surface of the holding pad 15. |
