MULTIFUNCTIONAL LIGHT-EMITTING DIODE INSPECTION APPARATUS COMPRISING CONFOCAL SENSOR

摘要

The multi-functional light-emitting diode inspection apparatus according to one embodiment of the present invention comprises: a stage unit on which the light-emitting diode is loaded, and which fixes the light-emitting diode on an inspection location or transfers the light-emitting diode to the inspection location; a focal sensor unit having a plurality of focal sensors for scanning the surface of the light-emitting diode and measuring the height of the surface of the light-emitting diode; and a control unit for controlling the operation of the stage unit and the focal sensor unit and comparing the surface height data collected by the focal sensor unit with pre-inputted data to determine whether or not the surface of the light-emitting diode is normal.