| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer ring exchanging device capable of performing the exchanging operation of a wafer ring stably, and to provide a chip mounting device which can be made compact by using such a wafer ring exchanging device.SOLUTION: A ring changer includes a ring holder for holding a wafer ring vertically in two stages, and a vertical motion mechanism for moving the ring holder vertically. A wafer ring of the ring holder is supplied to an exchange stage by a supply/return mechanism, and the wafer ring on the exchange stage is returned back to the ring holder. A changeover mechanism changes over an upper supply/return position corresponding to a wafer ring on the upper stage of a ring holder in the supply/return mechanism, and a lower supply/return position corresponding to a wafer ring on the lower stage of a ring holder. |
