PATTERN FORMATION METHOD, PATTERN FORMATION DEVICE, AND COMPUTER READABLE STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a pattern formation method capable of avoiding increase of manufacturing costs or deterioration of a throughput when a pattern is formed by block copolymer.SOLUTION: A pattern formation method includes steps of: forming a film of block copolymer containing at least two kinds of polymer on a film; separating at least the two kinds of polymer from each other by heating the film of the block copolymer; acquiring an image of a surface of the film of the block copolymer in which at least the two kinds of polymer are separated from each other; and determining whether at least the two kinds of polymer are properly separated from each other according to the image.