| 摘要 |
PROBLEM TO BE SOLVED: To collect particles evaporated from a laser irradiation part of a silicon substrate (B) immediately without requiring an ultraviolet laser light source.SOLUTION: A charge polarity sensor (1) for actually measuring the charge polarity of particles is provided, and a potential of reverse polarity from the actually measured charge polarity is applied to an electrode board (2). A large number of brush hairs (3) are stood from the electrode board (2). Furthermore, the air (P) near the surface of a silicon substrate (B) is sucked from a gas suction hole (4) of the electrode board (2) and discharged. Since UV-laser light is not radiated, particles are charged by an uncertain cause and the charge polarity cannot be known previously, but since the charge polarity is measured actually and a potential of reverse polarity is applied to the electrode board (2), particles can be collected immediately. |
