| 摘要 |
An imprint apparatus which brings a mold into contact with a resin coated on a substrate, and cures the resin, includes a substrate stage including a substrate chuck which holds the substrate, and a gas flow forming section arranged on the substrate stage so as to form a gas flow on the substrate. The gas flow forming section includes a blower which blows a gas in a direction which intersects with a plane parallel to an upper surface of the substrate, and a changing section which changes a direction, in which the gas blown by the blower flows, so that the gas flows along the upper surface of the substrate. The changing section has a maximum height higher than a height of the upper surface of the substrate held by the substrate chuck. |
