发明名称 |
Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same |
摘要 |
A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.
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申请公布号 |
US8591809(B2) |
申请公布日期 |
2013.11.26 |
申请号 |
US201113048153 |
申请日期 |
2011.03.15 |
申请人 |
RA BYUNG-KOOG;YUN TAE-SIK;LEE KUNHYUNG;KIM HYUNJOON;KIM HYEOGKI;KIM KIDOO;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
RA BYUNG-KOOG;YUN TAE-SIK;LEE KUNHYUNG;KIM HYUNJOON;KIM HYEOGKI;KIM KIDOO |
分类号 |
G01N21/00;B65B1/04;B65B1/30;B65B3/04;B65B3/26;B67C3/02;C23C16/24;G01N31/00;G01N33/00;G06F11/30;G21C17/00;H01L21/20;H01L21/36 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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