MEMS MICROPHONE WITH DUAL-BACKPLATE AND METHOD THE SAME

摘要

Disclosed are a micro electro mechanical system (MEMS) microphone having dual backplates and a method for manufacturing the same. An MEMS microphone according to the embodiment of the present invention comprises a substrate having a first backplate in the central part thereof; a membrane plate, arranged on the top of a first supporting unit formed in both sides on the top of the substrate, vibrating according to external sound pressure; and a second backplate arranged on the top of a second supporting unit formed in both sides on the top of the membrane plate.