发明名称 Apparatus for discharging waste gas
摘要 PURPOSE: An apparatus for discharging waste gas is provided to control the gap of an injection nozzle according to the amount and the kind of waste gas, and to adjust the amount of nitrogen gas. CONSTITUTION: A first discharge pipe(10) includes a first duct(12) formed at a waste gas inlet(11). The connection part of the first duct includes a step part(14), a first extension part(15), and a first inclined plane(16). A second discharge pipe includes a second duct formed at a waste gas outlet. A cover member covers a heater(320) installed at each connection part of the first discharge pipe and the second discharge pipe. A metal piece(40) is formed in the inclined surface of the first and the second discharge pipe.
申请公布号 KR101329769(B1) 申请公布日期 2013.11.15
申请号 KR20110127142 申请日期 2011.11.30
申请人 发明人
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
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