| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor reducing damage to a protrusion and having high reliability.SOLUTION: An acceleration sensor comprises: a plate-like movable electrode 4; a pair of beam parts 41, 42 respectively supporting sides of the movable electrode facing each other so that the movable electrode 4 is swingable; an upper fixed plate 2 arranged to be spaced from the movable electrode 4; fixed electrodes 21, 22, of the upper fixed plate 2, provided on a surface facing the movable electrode 4; and a protrusion 6, of the movable electrode 4, provided in a place being in contact with the fixed electrodes 21, 22. An arrangement part 61, of the movable electrode 4, where the protrusion 6 is arranged, is formed to have a thinner thickness than that of the movable electrode 4 and has a spring property. |
