| 发明名称 |
Thin film transistor (TFT) having copper electrodes |
| 摘要 |
A TFT structure is provided in which an oxidic semiconductor is used in combination with an electrode material based on a Cu alloy.
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| 申请公布号 |
US8581248(B2) |
申请公布日期 |
2013.11.12 |
| 申请号 |
US201013390388 |
申请日期 |
2010.08.25 |
| 申请人 |
SCHNEIDER-BETZ SABINE;SCHLOTT MARTIN;HERAEUS MATERIALS TECHNOLOGY GMBH & CO. KG |
发明人 |
SCHNEIDER-BETZ SABINE;SCHLOTT MARTIN |
| 分类号 |
H01L29/786 |
主分类号 |
H01L29/786 |
| 代理机构 |
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