| 摘要 |
PROBLEM TO BE SOLVED: To provide a modified polyhydroxystyrene resin obtained by using a polyhydroxystyrene resin synthesized by a well-known method and a resin modifier, and having improved properties, especially heat resistance of the polyhydroxystyrene, to provide a method for producing the resin, to provide a resist material using the modified polyhydroxystyrene resin, and to provide a pattern-forming method.SOLUTION: A modified polyhydroxystyrene resin obtained by modifying a polyhydroxystyrene resin with a resin modifier is regulated so that the resin modifier may be one or more selected from an amino condensate modified with formalin or formalin-alcohol, a phenol compound having two or more methylol groups or alkoxy methylol groups in average in one molecule, and an epoxy compound having two or more epoxy groups in average in one molecule, and the weight-averaged molecular weight (Mw) after the modification may be 1.4 times as heavy as the weight-averaged molecular weight (Mw) before the modification by the modification with the resin modifier. As a result, the weight-averaged molecular weight of the polyhydroxystyrene resin can be increased, and the heat resistance can be improved. |
