| 摘要 |
PROBLEM TO BE SOLVED: To provide a high output gas laser oscillator/amplifier including a resonator whose laser output does not reduce even in occurrence of a change in laser center wavelength by reducing a peak energy density of irradiation so as not to cause surface damage and distortion on a mirror in the resonator. SOLUTION: A gas laser device comprises a resonator including a rear-side mirror 1 and an output-side mirror 2, a laser chamber 3 filled with a laser gas disposed in the resonator, and excitation means 4 and 5 for exciting the laser gas in the laser chamber 3. Beam expansion optical systems 61 and 61' for increasing a diameter or a width of a laser beam on a mirror side are provided for at least one place between the laser chamber 3 and the rear-side mirror 1 and between the laser chamber 3 and the output-side mirror 2. COPYRIGHT: (C)2012,JPO&INPIT |
