CALIBRATION SYSTEM FOR LASER BEAM SCANNER

摘要

The present invention relates to a calibration system for laser beam scanner. The calibration system for laser beam scanner includes a laser beam source unit emitting and generating a laser beam; a scanner unit installed in the back part of the laser beam source and controlling the vertical and horizontal displacement of the laser beam emitted from the laser beam source unit; an optical unit installed between the scanner unit and a substrate and controlling focusing the laser beam emitted from the scanner unit on the substrate; a calibration plate forming a light scattering part in several points including a point corresponding to a pattern to be formed on the substrate; and a light sensor part adjacent to the calibration plate and sensing the laser beam reflected from the light scattering part of the calibration plate; a calibration unit extracting pattern correction data by using the detection result of the light sensor part; and a pattern information unit storing the pattern to be formed on the substrate and storing the pattern correction data extracted by the calibration unit.