发明名称 |
SYSTEM FOR DELIVERY OF PURIFIED MULTIPLE PHASES OF CARBON DIOXIDE TO A PROCESS TOOL |
摘要 |
A carbon dioxide supply method and system for supplying supercritical and subcritical phases of carbon dioxide on-demand to a substrate to create a novel and improved cleaning sequence for removal of contaminants contained in the substrate. The ability for the supply system to deliver vapor, liquid and supercritical phases of carbon dioxide in a specific sequence at predetermined times during a process cleaning sequence produces an improved removal of contaminants from the substrate compared to conventional carbon dioxide cleaning processes. |
申请公布号 |
WO2013158526(A1) |
申请公布日期 |
2013.10.24 |
申请号 |
WO2013US36547 |
申请日期 |
2013.04.15 |
申请人 |
PRAXAIR TECHNOLOGY, INC. |
发明人 |
BANERJEE, SOUVIK;GERRISTEAD, WILLIAM, R. |
分类号 |
H01L21/302;H01L21/02 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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