Measuring sensor for e.g. determining composition of liquid sample, has laser element manufactured from wafer material using thin layer technology, and resonance element structured on another wafer material

摘要

The sensor (1) has a laser element (2) for exciting components of a fluidic sample, and a resonance element (3) i.e. two-pronged tuning fork, for electrically detecting acoustic excitations of the fluidic sample. The laser element is manufactured from a wafer material (8) using thin layer technology. The resonance element is structured on another wafer material (9). The wafer materials are separated from each other and arranged in a sandwich structure, where a cavity (11) is formed between the wafer materials. The laser element and the resonance element are arranged in the cavity.