| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a capacitance type acceleration sensor, a manufacturing apparatus, and a capacitance type acceleration sensor which can improve yield in manufacturing the capacitance type acceleration sensor provided with a ventilation passage for the purpose of pressure adjustment within a sensor element.SOLUTION: A method of manufacturing a capacitance type acceleration sensor having a capacitor whose capacity changes according to acceleration includes the steps of: forming a groove, which forms a passage between an insulating substrate for filming a fixed electrode of the capacitor and a semiconductor substrate bonded on a surface opposite to a surface where the fixed electrode of the insulating substrate is filmed, on at least one of the semiconductor substrate and insulating substrate; forming a hole, which penetrates through the semiconductor substrate and communicates with the passage formed by the groove, on the semiconductor substrate; and forming an electrode lead-out hole, which penetrates through the insulating substrate, electrically connects the fixed electrode to the semiconductor substrate, and communicates with the passage formed by the groove, on the insulating substrate. |
