| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle and a photomask mounting the pellicle which need no adhesive nor new facility introduction, and facilitate cleaning of the photomask after detachment of the pellicle.SOLUTION: Instead of mask adhesive for laminating a pellicle and a photomask, carbon nano-fiber 4 deposited at a formation density of one hundred million carbon nano-fibers or more per square millimeter is used as a mounting layer, and the pellicle is constituted to be mounted on the photomask with the molecular force of the carbon nano-fibers 4. |
