发明名称 |
DEEP-UV OPTICAL COATING PREPARATION METHOD USING SPUTTERING DEPOSITION WITH PURE METAL TARGET |
摘要 |
A deep-UV optical coating preparation method includes the step of putting a high purity metal ingot and a substrate in a sputter chamber and electrically connecting a sputter power supply to the sputter chamber and the step of applying an inertia gas, oxygen and a fluorinated gas to the sputter chamber for causing deposition of a high-refraction fluorine-doped metal oxide film and a low-refraction metal fluoride film to form a deep ultraviolet optical coating having excellent optical and mechanical properties on the substrate.
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申请公布号 |
US2013248353(A1) |
申请公布日期 |
2013.09.26 |
申请号 |
US201213426236 |
申请日期 |
2012.03.21 |
申请人 |
LEE CHENG-CHUNG;LIAO BO-HUEI;NATIONAL CENTRAL UNIVERSITY |
发明人 |
LEE CHENG-CHUNG;LIAO BO-HUEI |
分类号 |
C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
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