| 摘要 |
PURPOSE: A vacuum angle valve device for preventing the deposition of byproducts is provided to individually assemble and dismantle a blocking member and a bellows as the blocking member and the bellows are detachably fixed on a fixed plate. CONSTITUTION: A vacuum angle valve device for preventing the deposition of byproducts comprises a valve body(10), an actuator(21), and a blocking member(23). A hollow part(11) is formed inside the valve body. A first passage(12) and a second passage(13) are formed outside the valve body and communicate with the hollow part. The actuator having a driving shaft(21a) is installed in the valve body. The blocking member is connected to the driving shaft of the actuator in a receiving space(15a) of the valve body to selectively close the first passage according to the operation of the actuator. A first inclined surface(14) is formed on the inner circumference of the first passage which comes into contact with the blocking member. A second inclined surface(23a) is formed on the edge of the front side of the blocking member. |
