| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrical characteristic measurement method which does not apply excessive pressure to an object to be measured by removing a foreign matter or the like on the object to be measured with an inexpensive and easy method, and a contact probe used for the same.SOLUTION: An electrical characteristic measurement method includes a step for applying a pad to a first tip part of a tip of a first probe and a second tip part of a tip of a second probe, a step for forming a cleaning part on the pad by applying press deformation to a first curved part of the first probe and a second curved part of the second probe and making the first tip part and the second tip part slide on the pad while approaching each other, a process for further applying press deformation to the first curved part and the second curved part to bring a first contact part formed on the first probe and a second contact part formed on the second probe into surface contact with the cleaning part, a step for stopping the sliding of the first tip part and the second tip part while maintaining the surface contact, and a step for measuring a predetermined electrical characteristic while maintaining the surface contact. |
