发明名称 |
VIBRATION PIECE, SENSOR UNIT AND ELECTRONIC APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a vibration piece capable of suppressing leakage output without lowering mechanical strength and also to provide a sensor unit and an electronic apparatus equipped with the vibration piece.SOLUTION: A vibration piece includes: a base part; driving vibration arms extending from one end of the base part; detecting vibration arms extending from the other end on the side opposite to one end of the base part; adjusting vibration arms extending from the base part to the side opposite to the driving vibration arms; and support parts extended from the base part and fixed to a substrate. An output signal of the adjusting vibration arms has an inverse phase with respect to the output signal of leakage vibration of the detecting vibration arms. |
申请公布号 |
JP2013167459(A) |
申请公布日期 |
2013.08.29 |
申请号 |
JP20120029180 |
申请日期 |
2012.02.14 |
申请人 |
SEIKO EPSON CORP |
发明人 |
NAKAGAWA HIROSHI |
分类号 |
G01C19/5607;H01L41/08;H01L41/09;H01L41/18;H01L41/187 |
主分类号 |
G01C19/5607 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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