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发明名称
Microelectromechanical thin film device of transition metal oxide, and manufacturing method thereof
摘要
申请公布号
EP2107039(A3)
申请公布日期
2013.08.28
申请号
EP20090156790
申请日期
2009.03.31
申请人
CONSIGLIO NAZIONALE DELLE RICERCHE - INFM ISTITUTO NAZIONALE PER LA FISICA DELLA MATERIA
发明人
PELLEGRINO, LUCA;BIASOTTI, MICHELE;SIRI, ANTONIO, SERGIO
分类号
B81B3/00;B81B7/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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