| 发明名称 |
Zirconia toughened alumina ESD safe ceramic composition, component, and methods for making same |
| 摘要 |
ESD safe ceramic component is provided which includes a sintered composition which is formed of a base material and a resistivity modifier. The base material includes a primary component and a secondary component, the primary component including Al2O3 and the secondary component including tetragonal-ZrO2.
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| 申请公布号 |
US8516857(B2) |
申请公布日期 |
2013.08.27 |
| 申请号 |
US20070779580 |
申请日期 |
2007.07.18 |
| 申请人 |
KWON OH-HUN;COUREAU CHRISTOPHE;GORSKI RICHARD A.;SIMPSON MATTHEW A.;COORSTEK, INC. |
发明人 |
KWON OH-HUN;COUREAU CHRISTOPHE;GORSKI RICHARD A.;SIMPSON MATTHEW A. |
| 分类号 |
C03B37/10;B23K20/10;C04B35/119;C04B35/49;C04B35/645;H01L;H01L21/00 |
主分类号 |
C03B37/10 |
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