AMORPHOUS CARBON FILM, METHOD FOR MANUFACTURING AMORPHOUS CARBON FILM, AND CONDUCTIVE MEMBER PROVIDED WITH AMORPHOUS CARBON FILM, AND FUEL CELL SEPARATOR

摘要

PROBLEM TO BE SOLVED: To provide an amorphous carbon film that has both conductivity and hydrophilicity, and exhibits surface quality suitable for a fuel cell separator, or the like.SOLUTION: An amorphous carbon film includes carbon as the primary component, and contains no greater than 30 at% of hydrogen, no greater than 20 at% of nitrogen, and no greater than 3 at% of oxygen (each excluding 0 at%), wherein when the total amount of carbon is 100 at%, the amount of carbon having sphybridized orbitals is at least 70 at% and less than 100 at%. Nitrogen and oxygen are present and concentrated on a film surface side, and the percent content of oxygen detected from the surface layer by X-ray photoelectron spectroscopy is 4-15 at% inclusive, and the percent content of nitrogen is 10-30 at% inclusive.