发明名称 SHEET ADHERING DEVICE AND ADHERING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet adhering device and an adhering method capable of restraining increase of an installation area together with increase of a size of a plate-like member as little as possible.SOLUTION: A sheet adhering device 1 comprises: support means 2 having an inclined face 21 inclined to a horizontal plane and supporting a plate-like member WF with the inclined face 21; feeding means 3 for feeding a raw fabric RS in which an adhesive sheet AS is temporarily adhered to one face of belt-like exfoliation sheet RL as a feeding object; exfoliation means 4 for exfoliating the adhesive sheet AS from the exfoliation sheet RL of the raw fabric RS fed by the feeding means 3; press means 5 for pressing the adhesive sheet AS exfoliated by the exfoliation means 4 to the plate-like member WF; and movement means 7 for relatively moving the support means 2 and the press means 5 in an in-plane direction of the inclined face 21 and adhering the adhesive sheet AS to the plate-like member WF.
申请公布号 JP2013157517(A) 申请公布日期 2013.08.15
申请号 JP20120018181 申请日期 2012.01.31
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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