发明名称 |
METHOD FOR MANUFACTURING WAFER FOR SOLAR CELL, METHOD FOR MANUFACTURING SOLAR CELL, AND METHOD FOR MANUFACTURING SOLAR CELL MODULE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a wafer for a solar cell capable of manufacturing a solar cell having high conversion efficiency by making a surface of a semiconductor wafer such as a silicon wafer porous safely and inexpensively.SOLUTION: A method for manufacturing a wafer for a solar cell by making at least one surface of a semiconductor wafer porous comprises: a first step (S1) of bringing a lower alcohol solution into contact with at least the one surface of the semiconductor wafer; a second step (S2) of bringing hydrofluoric acid including metal ions into contact with at least the one surface of the semiconductor wafer after the first step; and a third step (S5) of bringing an acid solution including hydrofluoric acid and nitric acid into contact with at least the one surface of the semiconductor wafer after the second step. |
申请公布号 |
JP2013143531(A) |
申请公布日期 |
2013.07.22 |
申请号 |
JP20120004034 |
申请日期 |
2012.01.12 |
申请人 |
SUMCO CORP |
发明人 |
OKUUCHI SHIGERU |
分类号 |
H01L31/04;H01L21/306;H01L21/308 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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