发明名称 METHOD FOR MANUFACTURING WAFER FOR SOLAR CELL, METHOD FOR MANUFACTURING SOLAR CELL, AND METHOD FOR MANUFACTURING SOLAR CELL MODULE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a wafer for a solar cell capable of manufacturing a solar cell having high conversion efficiency by making a surface of a semiconductor wafer such as a silicon wafer porous safely and inexpensively.SOLUTION: A method for manufacturing a wafer for a solar cell by making at least one surface of a semiconductor wafer porous comprises: a first step (S1) of bringing a lower alcohol solution into contact with at least the one surface of the semiconductor wafer; a second step (S2) of bringing hydrofluoric acid including metal ions into contact with at least the one surface of the semiconductor wafer after the first step; and a third step (S5) of bringing an acid solution including hydrofluoric acid and nitric acid into contact with at least the one surface of the semiconductor wafer after the second step.
申请公布号 JP2013143531(A) 申请公布日期 2013.07.22
申请号 JP20120004034 申请日期 2012.01.12
申请人 SUMCO CORP 发明人 OKUUCHI SHIGERU
分类号 H01L31/04;H01L21/306;H01L21/308 主分类号 H01L31/04
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