Capacitive acceleration sensor for acceleration measurement device, has evaluation circuits to evaluate first and second electrical measuring capacitances of second movable electrode and fourth electrode in first mode and third mode

摘要

The sensor has first electrode (22) and second electrode (24) which are both movable relative to substrate (10). The third electrodes (26,28) are associated with first electrode of the mass element (12). An electrical voltage is applied to fourth electrode (30) by electrostatic force on the mass element. The evaluation circuits are adapted to evaluate the first electrical measuring capacitance and second electrical measuring capacitance of the second movable electrode and fourth electrode in first mode and third mode. An independent claim is included for acceleration measurement device.