INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: An inertia sensor and a manufacturing method thereof are provided to prevent errors in driving and sensing in advance by not using an adhesive. CONSTITUTION: An inertia sensor (100) comprises a membrane (110), a mass body (130), a post (140), and a cap (150). The mass body is formed at the lower portion of the center part (113) of the membrane. The post is formed at the lower portion of an edge (115) of the membrane. The cap welds an edge (155) at the lower surface of the post in a low temperature silicon direct bonding method.