| 摘要 |
PURPOSE: An electric furnace controlling temperature with a pressure controller is provided to precisely control the temperature and to uniformly supply the temperature distribution by preventing a supply shortage of working fluid due to a mixing of the working fluid and the formation of a steam film in the working fluid. CONSTITUTION: An electric furnace(100) controlling temperature with a pressure controller comprises an evaporator(110), a compensation room(120), a fluid discharge part(113), a steam flow homogenizer(130), a cooling jacket(140), a fluid inlet part(121), and a precise temperature control device(160). The compensation room is located on an upper part of the evaporator and accommodates working fluid(150) in which a liquid fluid(151) is mixed with a gas fluid(152) by being evaporated with the heat of a wick(111). The fluid discharge part discharges the gas fluid generated by the evaporator. The steam flow homogenizer receives the gas fluid from the fluid discharge part. The cooling jacket cools the gas fluid discharged from the steam flow homogenizer. The precise temperature control device controls the temperature by controlling the pressure of the working fluid. One or more accommodating parts are included inside the steam flow homogenizer and a heated object is heated in the accommodating parts. |
