| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment method capable of accurately performing alignment in a simple method and a manufacturing method of a mask. <P>SOLUTION: The alignment method comprises steps of: spraying a plurality of particles 15 onto a part of a substrate 11; and detecting coordinates of the particles 15. The alignment method further comprises a step of aligning the substrate 11 using the plurality of particles 15 as an alignment mark. <P>COPYRIGHT: (C)2013,JPO&INPIT |
