| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device which, even when no light shield mask is available, can irradiate a panel with light in the necessary wavelength without causing damage to the panel, and a metal halide lamp. <P>SOLUTION: The light irradiation device includes a metal halide lamp, a double tube, and an oxide film. The metal halide lamp includes a cylindrical arc tube made of quartz glass. The double tube consists of a cylindrical first tube made of quartz glass which is an inner tube provided at a position to enclose the arc tube of the metal halide lamp in cylindrical form and a cylindrical second tube made of quartz glass which is an outer tube provided at a position to enclose the inner tube in cylindrical form, a space between the first and the second tubes being constructed as a closed space allowing for a fluid to be flowed therein. The oxide film is formed on the outside face of the outer tube of the double tube or on a face of the inner tube of the double tube opposed to the metal halide lamp, ranges in thickness from 0.4 μm to 1.0 μm, both ends incl., and contains titanium, silicon, bismuth or cerium, and tantalum. <P>COPYRIGHT: (C)2013,JPO&INPIT |
