| 发明名称 |
HOLDER DEVICE, CHAMBER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM |
| 摘要 |
A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.
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| 申请公布号 |
US2013134330(A1) |
申请公布日期 |
2013.05.30 |
| 申请号 |
US201213620589 |
申请日期 |
2012.09.14 |
| 申请人 |
FUJIMOTO JUNICHI;KAMEDA HIDENOBU;WAKABAYASHI OSAMU;ASHIKAWA KOUJI;GIGAPHOTON INC |
发明人 |
FUJIMOTO JUNICHI;KAMEDA HIDENOBU;WAKABAYASHI OSAMU;ASHIKAWA KOUJI |
| 分类号 |
G02B7/02;G02B7/182;G21K5/04 |
主分类号 |
G02B7/02 |
| 代理机构 |
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代理人 |
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