| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter to prevent reflection coatings from being stuck together. <P>SOLUTION: A wavelength variable interference filter includes a first cavity part 45 sealed by including a first reflection coating 14, a second reflection coating 24 and an electrostatic actuator 40 between a first substrate 10 and a second substrate 20, and a second cavity part 46 sealed between a second substrate 20 and a third substrate 30. The inside of the first cavity part 45 and the inside of the second cavity part 46 are kept at pressure lower than the atmospheric pressure, and the pressure in the first cavity part 45 is higher than the pressure in the second cavity part 46. <P>COPYRIGHT: (C)2013,JPO&INPIT |
