发明名称 DOUBLE FLIP SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATION
摘要 <P>PROBLEM TO BE SOLVED: To provide a double flip-chip semiconductor device formed by a double flip fabrication process. <P>SOLUTION: Epitaxial layers are grown on a substrate in the normal fashion with n-type layers 204 grown first and p-type layers 206 grown subsequently. The chip is flipped a first time and mounted to a sacrificial layer. The original substrate is removed to expose the n-type layer, and additional layers and treatments are added to the device. Because the n-type layer is exposed during fabrication, the layer may be processed in various ways to improve light extraction. The chip is flipped a second time and mounted to a support element. The sacrificial layer is then removed and additional layers and treatments are added to the device. The finished device features a configuration in which the layers maintain the same orientation with respect to the support element that they had with the original substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013080958(A) 申请公布日期 2013.05.02
申请号 JP20120288056 申请日期 2012.12.28
申请人 CREE INC 发明人 BATRES MAX;IBBETSON JAMES;MEDENDORP NICHOLAS W JR;GARCERAN JULIO A
分类号 H01L33/32;H01L33/00;H01L33/10;H01L33/22;H01L33/40;H01L33/44 主分类号 H01L33/32
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