发明名称 |
PLATING BATH AND METHOD |
摘要 |
Copper plating baths containing a leveling agent that is a reaction product of one or more of certain pyridine compounds with one or more epoxide-containing compounds, that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
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申请公布号 |
US2013098770(A1) |
申请公布日期 |
2013.04.25 |
申请号 |
US201113280135 |
申请日期 |
2011.10.24 |
申请人 |
NIAZIMBETOVA ZUHRA I.;RZEZNIK MARIA ANNA;ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
NIAZIMBETOVA ZUHRA I.;RZEZNIK MARIA ANNA |
分类号 |
C25D3/38;C07D213/73;C07D213/74;C07D215/38;C07D401/06;C07D471/04 |
主分类号 |
C25D3/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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