| 摘要 |
A titanium-nickel-palladium solderable metal system for silicon power semiconductor devices (10), which may be used for one or both of the anode (20) or cathode (30). The metal system includes an outer layer of palladium (40,70), an intermediate layer of nickel (50,80), and an inner layer of titanium (60,90). For certain applications, the nickel may be alloyed with vanadium. The metal system may be deposited on bare silicon (100) or on one or more additional layers of metal (110) which may include aluminum, aluminum having approximately 1% silicon, or metal silicide. The use of palladium, rather than gold or silver, reduces cost, corrosion, and scratching. |
