| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a board inspection apparatus and method. <P>SOLUTION: An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be more accurately determined. <P>COPYRIGHT: (C)2013,JPO&INPIT |
