SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT METHOD AND COMPUTER-READABLE STORAGE MEDIUM WHICH STORES SUBSTRATE TREATMENT PROGRAM

摘要

The present invention provides a substrate treatment device (1) for treating a substrate (2) in a substrate treatment chamber (7), in which a cover (5) of a carrier (3) loaded onto a carrier loading base (6) is opened and the substrate (2) housed in the carrier (3) is transported to the substrate treatment chamber (7), a substrate treatment method and a substrate treatment program. If (a) specific condition(s) is(are) fulfilled when a first carrier (3) loaded onto the carrier loading base (6) is being treated, the cover (5) of the second carrier (3) is opened and treatment of the substrate (2) starts.