发明名称 ELECTROCHEMICAL ISOTHERMAL-CAPACITANCE- TRANSIENT SPECTROMETER
摘要 PURPOSE: An electrochemical-isothermal-transient spectroscope is provided to easily measure the thickness of a sample by using an ICTS(Isothermal Capacitance Transient Spectroscopy) measuring part. CONSTITUTION: An electrochemical cell(10) includes an electrolyte accommodating part, a sample mounting part, and electrodes. A C-V measuring unit(20) is electrically connected to the electrochemical cell. The C-V measuring unit measures the capacitance of a sample. An ICTS measuring unit(30) measures the spectrum of an ICTS.
申请公布号 KR101241756(B1) 申请公布日期 2013.03.15
申请号 KR20120079839 申请日期 2012.07.23
申请人 HOSEO UNIVERSITY ACADEMIC COOPERATION FOUNDATION 发明人 OH, DONG CHEOL
分类号 H01L21/66 主分类号 H01L21/66
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