| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that it is difficult to modify a forming surface of a metal mold having a concave portion or an entire surface of a large component homogeneously. <P>SOLUTION: The inside of a chamber 1 is evacuated. Argon gas is supplied in an anode electrode 5B. The argon gas, which has a pressure necessary and sufficient to decrease an electron velocity into a velocity with which the edge shape of a concave portion is not lost, is intervened between the anode electrode 5B and an irradiation body 6. The distance between a cathode electrode 5A and the irradiation body 6 is made as short as possible within the region where an electron acceleration space S, a plasma space P and an electron deceleration space G can exist. A plasma is generated in the plasma space P by applying a voltage to the anode electrode 5B. An electron beam is generated by applying the voltage between the cathode electrode 5A and the irradiation body 6. The electron beam is irradiated on the selected irradiation surface of the irradiation body 6. <P>COPYRIGHT: (C)2013,JPO&INPIT |
