A pellicle for lithography and a method of making thereof

摘要

A pellicle is proposed wherein the mask-bonding agglutinant layer coated on one annular face of the pellicle frame is designed to have a cross-section which is trapezoidal (including the case of rectangle) so that the angle alpha (±) included between the side wall of the agglutinant layer and said annular face is 90 degrees or smaller.